Optical properties of a nanoporous array in silicon
نویسندگان
چکیده
منابع مشابه
Optical properties of a nanoporous array in silicon
We demonstrate an approach for producing an array of nanopores on a silicon surface. The methods used combine nonlithographic pattern transfer and chlorine plasma etching to produce ,60 nm diam holes up to 1 mm in depth. The near-normal specular optical reflectance of these systematically modified surfaces is found to decrease dramatically with pore depth across the entire 2.0–6.0 eV photon ene...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2005
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.1831541